Topic: detectors

Electron lenses and aberrations: what affects the resolution in electron microscopes?

By Marijke Scotuzzi - Aug 30, 2018

Resolution is one of the most important parameters in a scanning electron microscope (SEM). The lower the resolution, the smaller the features that can be seen. The resolution, which is typically not defined (and therefore measured) in a unique way, depends on the size of the beam when focused on the sample.

Resolution is one of the most important parameters in a scanning electron microscope (SEM). The lower the resolution, the smaller the features that can be seen. The resolution, which is typically not defined (and therefore measured) in a unique way, depends on the size of the beam when focused on the sample.

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SEM working principle: the detection of backscattered electrons

By Marijke Scotuzzi - Jun 14, 2018

Backscattered electrons (BSEs) are high-energy electrons that are produced by the elastic scattering of the primary beam electrons with the atom nuclei. The yield of BSEs, that is the ratio of the number of emitted BSEs and the amount of primary beam electrons, depends on the atomic number: the higher the atomic number, or the heavier the element, the brighter the contrast. In the Phenom SEM, BSEs are detected using four-quadrant semiconductor detectors placed above the sample. In this blog, we will explain what a semiconductor detector is and how backscattered electrons are detected in a scanning electron microscope.

Backscattered electrons (BSEs) are high-energy electrons that are produced by the elastic scattering of the primary beam electrons with the atom nuclei. The yield of BSEs, that is the ratio of the number of emitted BSEs and the amount of primary beam electrons, depends on the atomic number: the higher the atomic number, or the heavier the element, the brighter the contrast. In the Phenom SEM, BSEs are detected using four-quadrant semiconductor detectors placed above the sample. In this blog, we will explain what a semiconductor detector is and how backscattered electrons are detected in a scanning electron microscope.

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